> >AS ISO 17560-2006
AS ISO 17560-2006 View larger

AS ISO 17560-2006

M00003455

New product

AS ISO 17560-2006 [ Withdrawn ] Surface chemical analysis - Secondary-ion mass spectrometry - Method for depth profiling of boron in silicon

standard by Standards Australia, 10/20/2006

More details

In stock

$46.25

More info

Full Description

Adopts ISO 17560:2002 to specify a secondary-ion mass spectrometric method using magnetic-sector or quadrupole mass spectrometers for depth profiling of boron in silicon and using stylus profilometry or optical interferometry for depth scale calibration.

Product Details

Edition: 1st Published: 10/20/2006 ISBN(s): 0733777872 Number of Pages: 10 File Size: 1 file , 770 KB Product Code(s): 10090409, 10090404, 10090419