DIN 50451-5 - DRAFT

DIN 50451-5 - DRAFT Draft Document - Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 5: Guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation for the determination of trace elements in the range of micrograms per kilogram and nanograms per kilogram

standard by Deutsches Institut Fur Normung E.V. (German National Standard), 02/01/2022