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IEC 62047-28 Ed. 1.0 en:2017

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IEC 62047-28 Ed. 1.0 en:2017 Semiconductor devices - Micro-electromechanical devices - Part 28: Performance testing method of vibration-driven MEMS electret energy harvesting devices

standard by International Electrotechnical Commission, 01/20/2017

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IEC62047-28:2017(E) specifies terms and definitions, and a performance testing method of vibration driven MEMS electret energy harvesting devices to determine the characteristic parameters for consumer, industry or any application.
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1000m are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.

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Edition: 1.0 Published: 01/20/2017 Number of Pages: 17File Size: 1 file , 510 KB