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IEC 62047-1 Ed. 2.0 b:2016
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IEC 62047-1 Ed. 2.0 b:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
standard by International Electrotechnical Commission, 01/06/2016
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IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.