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ISO 22278:2020

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ISO 22278:2020 Fine ceramics (advanced ceramics, advanced technical ceramics) - Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam

standard by International Organization for Standardization, 08/01/2020

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ISO 22278:2020 specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.

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Edition: 1st Published: 08/01/2020 Number of Pages: 36 File Size: 1 file , 3.6 MB