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ISO 18115-3:2022

M00001730

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ISO 18115-3:2022 Surface chemical analysis - Vocabulary - Part 3: Terms used in optical interface analysis

standard by International Organization for Standardization, 07/01/2022

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This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.