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ISO 18115-3:2022
M00001730
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ISO 18115-3:2022 Surface chemical analysis - Vocabulary - Part 3: Terms used in optical interface analysis
standard by International Organization for Standardization, 07/01/2022
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Full Description
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.